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About this Engineering article
Study of HCl and Secco Defect Etching for Characterization of Thick sSOI by Abbadie, A.; Bedell, S. W.; Hartmann, J. M.; Sadana, D. K.; Brunier, F.; Figuet, C.; Cayrefourcq, I. is a Engineering article available to read on EtoBox.
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- Author
- Abbadie, A.; Bedell, S. W.; Hartmann, J. M.; Sadana, D. K.; Brunier, F.; Figuet, C.; Cayrefourcq, I.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2007
- Field
- Engineering (Physical Sciences)