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About this Engineering article
An Inexpensive Electron Beam Lithographic System and Its Application to Monolithic Circuit Fabrication by B.N. Lyons is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- B.N. Lyons
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd; Elsevier BV (ISSN 0026-2692)
- Published
- 1985
- Field
- Engineering (Physical Sciences)