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About this Engineering article
Electrically detected magnetic resonance study on interface defects at nitrided Si-face, a -face, and m -face 4H-SiC/SiO 2 interfaces by Higa, E.; Sometani, M.; Hirai, H.; Yano, H.; Harada, S.; Umeda, T. is a Engineering article available to read on EtoBox.
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- Author
- Higa, E.; Sometani, M.; Hirai, H.; Yano, H.; Harada, S.; Umeda, T.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2020
- Field
- Engineering (Physical Sciences)
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