About this document
Light Sensitive Diazo Compound Patent by jean christian Selles is a document available to read on EtoBox.
The patent describes a light-sensitive diazo compound and its composition, focusing on photosensitizers made from esters of 1-oxo-2-diazo-naphthalene sulfonic acid and 4-benzyl-1,2,3-trihydroxybenzene. These compounds improve photosensitivity in the mid UV range, enhancing the performance of positive tone lithographic resists used in semiconductor manufacturing. The document outlines methods for synthesizing these compounds, highlighting their solubility and effectiveness in developing high-resolution image
- Author
- jean christian Selles
- Language
- EN