Can I read Field Guide to Optical Lithography (SPIE Vol. FG06) on EtoBox?

Field Guide to Optical Lithography (SPIE Vol. FG06) by Chris A. Mack is a nonfiction available to read on EtoBox.

What is Field Guide to Optical Lithography (SPIE Vol. FG06) about?

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry. Contents - Symbol Glossary - The Lithgraphy Process - Image Formation - Imaging into a Photoresist - Photoresist Chemistry - Lithography Control and Optimization - Equation Summary - Glossary - Index

Who reads Field Guide to Optical Lithography (SPIE Vol. FG06)?

Author

Chris A. Mack

Publisher

SPIE Publications

Published

2006

Language

EN

ISBN

9780819478214

Category

nonfiction

Subjects

Engineering, Stem