About this scholarly article

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Lithographic and Micromachining Techniques for Optical Component Fabrication II - Fabrication of polymer cantilevers for force-controlled atomic force microscope by Kato, Nobuhiro; Kley, Ernst-Bernhard; Herzig, Hans Peter; Park, Choong Sik; Matsumoto, Toshiro; Kikuta, Hisao; Iwata, Koichi is a scholarly article available to read on EtoBox.

Author

Kato, Nobuhiro; Kley, Ernst-Bernhard; Herzig, Hans Peter; Park, Choong Sik; Matsumoto, Toshiro; Kikuta, Hisao; Iwata, Koichi

Publisher

SPIE

Published

2003