About this scholarly article

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry by Dixit, Dhairya; Dey, Sonal; Kagalwala, Taher; Timoney, Padraig; Ramnath, Yudesh; Elia, Alexander; Paranjape, Ninad; Keller, Nick; Vaid, Alok is a scholarly article available to read on EtoBox.

Author

Dixit, Dhairya; Dey, Sonal; Kagalwala, Taher; Timoney, Padraig; Ramnath, Yudesh; Elia, Alexander; Paranjape, Ninad; Keller, Nick; Vaid, Alok

Publisher

IEEE

Published

2019

Language

EN