Can I read Important RIE Silica Paper on EtoBox?
Important RIE Silica Paper by ABCD is a document available to read on EtoBox.
What is Important RIE Silica Paper about?
This document discusses the fabrication of submicron structures in a nanoparticle/polymer composite using holographic lithography and reactive ion etching (RIE). The process involves the dispersion of silica nanoparticles in an SU8 polymer matrix, followed by patterning through holographic lithography and transferring the pattern via RIE. The resulting honeycomb structures demonstrate the effectiveness of this method for creating complex nanostructures suitable for photonic applications.
- Author
- ABCD
- Language
- EN