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Photonic Crystals of Titanium Dioxide Fabricated by Swift Heavy Ions by Koichi Awazu; Makoto Fujimaki; Yoshimichi Ohki; Tetsuro Komatsubara is a Physics and Astronomy article available to read on EtoBox.

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We have developed a method of fabricating nano-micro-structures in a rutile TiO 2 single crystal using swift heavy-ion irradiation that takes advantage of the good etching selectivity induced by ion irradiation. The areas into which ions heavier than Cl and accelerated with MeV-order high energy had been irradiated were readily etched by 20% hydrofluoric acid. By comparison, etching was not observed in pristine TiO 2 single crystals. We discovered that the irradiated area could be etched to a depth at which the electronic stopping power of the ion decayed to a value of 6.2 keV/nm. In other words, etching was not observed in TiO 2 single crystals possessing electron stopping power below a threshold value of 6.2 keV/nm. We also found that the value of the electronic stopping power first increased, and then decreased with depth in TiO 2 single crystals when irradiated with, for example, 84.5 MeV Ca ion. Using this type of beam, the inside of the TiO 2 single crystal was selectively etched with 20% hydrofluoric acid, while the top surface of the TiO 2 single crystal subjected to irradiation was not etched. It initially appeared that an air gap was created in the region 4-8 m from the t

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Author

Koichi Awazu; Makoto Fujimaki; Yoshimichi Ohki; Tetsuro Komatsubara

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 1350-4487)

Published

2005

Language

EN

Field

Physics and Astronomy (Physical Sciences)