Opening book details…
About this Engineering article
Fabrication of Silicon Nanopillar Teradot Arrays by Electron-Beam Patterning for Nanoimprint Molds by Jung-Sub Wi; Hyo-Sung Lee; Kipil Lim; Sung-Wook Nam; Hyun-Mi Kim; Soo-Yeon Park; Jae Jong Lee; Chris Daehoon Hong; Sungho Jin; Ki-Bum Kim is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jung-Sub Wi; Hyo-Sung Lee; Kipil Lim; Sung-Wook Nam; Hyun-Mi Kim; Soo-Yeon Park; Jae Jong Lee; Chris Daehoon Hong; Sungho Jin; Ki-Bum Kim
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley - V C H Verlag GmbbH & Co.; Publons; Wiley (ISSN 1613-6810)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)