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About this book
Reaction mechanism of the Me3AuPMe3–H2 plasma-enhanced ALD process by Michiel Van Daele & Matthew B. E. Griffiths & Matthias M. Minjauw & Se & #xE1;n T. Barry & Christophe Detavernier & Jolien Dendooven is a book available to read on EtoBox.
- Author
- Michiel Van Daele & Matthew B. E. Griffiths & Matthias M. Minjauw & Se & #xE1;n T. Barry & Christophe Detavernier & Jolien Dendooven
- Publisher
- Royal Society of Chemistry
- Language
- EN
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