About this scholarly article

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Performance consideration for the scaling of submicron on-chip interconnections by Mii, Yuh-J.; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna is a scholarly article available to read on EtoBox.

Author

Mii, Yuh-J.; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna

Publisher

SPIE

Published

1993