About this scholarly article

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film by Luginbubl, P.; Racine, G.-A.; Lerch, P.; Romanowicz, B.; Brooks, K.G.; de Rooij, N.F.; Renaud, P.; Setter, N. is a scholarly article available to read on EtoBox.

Author

Luginbubl, P.; Racine, G.-A.; Lerch, P.; Romanowicz, B.; Brooks, K.G.; de Rooij, N.F.; Renaud, P.; Setter, N.

Publisher

IEEE

Published

1995