About this scholarly article

2010 IEEE International Solid-State Circuits Conference - (ISSCC) - ES4: Fusion of MEMS and circuits by Shigematsu, Satoshi; Arimoto, Kazutami; Hagleitner, Christoph is a scholarly article available to read on EtoBox.

Author

Shigematsu, Satoshi; Arimoto, Kazutami; Hagleitner, Christoph

Publisher

IEEE

Published

2010