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About this Engineering article
Degradation of Oxide Films Due to Radiation Effects in Exposure to Plasmas in Sputter Deposition and Backsputtering by D. Mccaughan; R. Kushner is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D. Mccaughan; R. Kushner
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9219)
- Published
- 1974
- Language
- EN
- Field
- Engineering (Physical Sciences)