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About this Materials Science article
Nitridation of Ultrathin SiO2 Layers in Metal-Ferroelectric-Insulator-Semiconductor Structures by HIRAKAWA, MASAKAZU; HIROOKA, GEN; NODA, MINORU; OKUYAMA, MASANORI; HONDA, KAZUHIRO; MASUDA, ATSUSHI; MATSUMURA, HIDEKI is a Materials Science article available to read on EtoBox.
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- Author
- HIRAKAWA, MASAKAZU; HIROOKA, GEN; NODA, MINORU; OKUYAMA, MASANORI; HONDA, KAZUHIRO; MASUDA, ATSUSHI; MATSUMURA, HIDEKI
- Publisher
- Taylor and Francis Group; Informa UK (Taylor & Francis); Gordon and Breach Science Publishers; Informa UK Limited (ISSN 1058-4587)
- Published
- 2004
- Field
- Materials Science (Physical Sciences)