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About this Engineering article
Development of multiple As delta layer Si reference thin film for shallow junction secondary ion mass spectrometry profiling by D. W. Moon; H. I. Lee; H. K. Kim; K. J. Kim; H. K. Shon; J. Y. Won; J. C. Lee; F. Toujou is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D. W. Moon; H. I. Lee; H. K. Kim; K. J. Kim; H. K. Shon; J. Y. Won; J. C. Lee; F. Toujou
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)