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About this book
Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water by Nils Boysen & David Zanders & Thomas Berning & Sebastian M. J. Beer & Detlef Rogalla & Claudia Bock & Anjana Devi is a book available to read on EtoBox.
- Author
- Nils Boysen & David Zanders & Thomas Berning & Sebastian M. J. Beer & Detlef Rogalla & Claudia Bock & Anjana Devi
- Publisher
- Royal Society of Chemistry
- Language
- EN
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