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About this Engineering article
Study of SiO2 surface sputtering by a 250–550 keV He+ ion beam during high-resolution Rutherford backscattering measurements by Susumu Kusanagi; Hajime Kobayashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Susumu Kusanagi; Hajime Kobayashi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)