About this scholarly article

SPIE Proceedings [SPIE 14th Annual BACUS Symposium on Photomask Technology and Management - Santa Clara, CA (Wednesday 14 September 1994)] 14th Annual BACUS Symposium on Photomask Technology and Management - Focused ion beam (FIB) repair of embedded shifter masks by Morgan, John C.; Ferranti, David C.; Pennelli, Chris; Saxonis, A.; Joyce, William C.; Brodsky, William L.; Shelden, Gilbert V. is a scholarly article available to read on EtoBox.

Author

Morgan, John C.; Ferranti, David C.; Pennelli, Chris; Saxonis, A.; Joyce, William C.; Brodsky, William L.; Shelden, Gilbert V.

Publisher

SPIE

Published

1994

Language

EN