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About this Engineering article
Optical Properties of Thin Amorphous Silicon Film on a Phase Shift Mask for 157 nm Lithography by Kim, Sung Kwan; Kim, Yang Soo; Choi, Young Min; Choi, Jong Wan; Hong, Jongin; Shon, Jung Min; Sung, Tae-Hyun; No, Kwang Soo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, Sung Kwan; Kim, Yang Soo; Choi, Young Min; Choi, Jong Wan; Hong, Jongin; Shon, Jung Min; Sung, Tae-Hyun; No, Kwang Soo
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2004
- Field
- Engineering (Physical Sciences)