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About this Engineering article
Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring by Settens, Charles; Cordes, Aaron; Bunday, Benjamin; Bello, Abner; Kamineni, Vimal; Paul, Abhijeet; Fronheiser, Jody; Matyi, Richard is a Engineering article available to read on EtoBox.
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- Author
- Settens, Charles; Cordes, Aaron; Bunday, Benjamin; Bello, Abner; Kamineni, Vimal; Paul, Abhijeet; Fronheiser, Jody; Matyi, Richard
- Publisher
- The International Society for Optical Engineering; SPIE - International Society for Optical Engineering; S P I E - International Society for Optical Engineering; SPIE-Intl Soc Optical Eng (ISSN 1932-5150)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)