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About this Engineering article
High-rate deposition by microwave RPECVD at atmospheric pressure by R.P. Cardoso; T. Belmonte; F. Kosior; G. Henrion; E. Tixhon is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- R.P. Cardoso; T. Belmonte; F. Kosior; G. Henrion; E. Tixhon
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)
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