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What is TOF-SIMS for Surface Chemical Analysis about?

This document provides an overview of static time-of-flight secondary ion mass spectrometry (TOF-SIMS) for analyzing the chemical composition of surfaces. It explains that TOF-SIMS allows high-sensitivity analysis of monolayers with high mass resolution and lateral resolution down to 0.1 micrometers. Examples are given of TOF-SIMS being used to study various material surfaces like silicon, polymers, and thin films. The principles of TOF-SIMS are outlined and its capabilities for both large-area and high-res

Author

sabzineh

Language

EN