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Uesugi 2020 by AYAD is a document available to read on EtoBox.

This study investigates the growth of AlGaN films on face-to-face annealed sputter-deposited AlN templates, revealing that low threading dislocation density leads to the formation of large hillock structures. The research demonstrates that using sapphire substrates with larger off-cuts can suppress these hillocks, resulting in improved surface flatness and optical properties of the AlGaN layers. These findings suggest a promising approach for enhancing the efficiency of AlGaN-based deep ultraviolet light-em

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AYAD

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EN