Can I read Morphological Influence of the Beam Overlap in Focused Ion Beam Induced Deposition Using Raster Scan on EtoBox?

Morphological Influence of the Beam Overlap in Focused Ion Beam Induced Deposition Using Raster Scan by Chung-Soo Kim; Hyung-Jung Kim; Sung-Hoon Ahn; Dong-Young Jang is a Engineering article available to read on EtoBox.

What is Morphological Influence of the Beam Overlap in Focused Ion Beam Induced Deposition Using Raster Scan about?

Material addition using focused ion beam induced deposition (FIBID) is a well-established local deposition technology in microelectronic engineering. We investigated FIBID characteristics as a function of beam overlap using phenanthrene molecules. To initiate the localization of gas molecules, we irradiated the ion beams using a raster scan. We varied the beam overlap between À900% and 50% by adjusting the pixel size from 300 nm to 15 nm. We discuss the changes in surface morphologies and deposition rates due to delocalization by the range effect of excited surface atoms, the divided structure by continuous effect from the raster scan, enhanced localization by discrete effect from replenished gas molecules, the competition between deposition and sputtering processes, and the change in processing time with scan speed (smaller overlap case).

Who reads Morphological Influence of the Beam Overlap in Focused Ion Beam Induced Deposition Using Raster Scan?

Author

Chung-Soo Kim; Hyung-Jung Kim; Sung-Hoon Ahn; Dong-Young Jang

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)

Published

2010

Language

EN

Field

Engineering (Physical Sciences)