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A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders by Michał Szermer; Piotr Zając; Piotr Amrozik; Cezary Maj; Mariusz Jankowski; Grzegorz Jabłoński; Rafał Kiełbik; Jacek Nazdrowicz; Małgorzata Napieralska; Bartosz Sakowicz is a Engineering article available to read on EtoBox.

What is A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders about?

The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if th

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Author

Michał Szermer; Piotr Zając; Piotr Amrozik; Cezary Maj; Mariusz Jankowski; Grzegorz Jabłoński; Rafał Kiełbik; Jacek Nazdrowicz; Małgorzata Napieralska; Bartosz Sakowicz

Publisher

MDPI AG

Published

2021

Language

EN

Field

Engineering (Physical Sciences)