About this scholarly article

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - Phase correlation method for subpixel in-plane vibration measurements of MEMS by stroboscopic microscopy by Serio, B.; Osten, Wolfgang; Gorecki, Christophe; Hunsinger, J. J.; Teyssieux, D. D.; Novak, Erik L.; Cretin, B. is a scholarly article available to read on EtoBox.

Author

Serio, B.; Osten, Wolfgang; Gorecki, Christophe; Hunsinger, J. J.; Teyssieux, D. D.; Novak, Erik L.; Cretin, B.

Publisher

SPIE

Published

2005

Language

EN