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About this Engineering article
Dry Etching of Crystalline Quartz in a Planar Plasma Reactor by P. Danesh; B.G. Pantchev is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- P. Danesh; B.G. Pantchev
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1982
- Field
- Engineering (Physical Sciences)