About this Engineering article
Design of Injection Feed Multiwafer Low‐Pressure Chemical Vapor Deposition Reactors by Zambov, Ludmil is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zambov, Ludmil
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 1998
- Field
- Engineering (Physical Sciences)