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Compact Narrow-linewidth Solid-state 193-Nmpulsed Laser Source Utilizing an Opticalparametric Amplifier and Its Vortex Beamgeneration by Zhitao Zhang,a,† Xiaobo Heng,a,† Junwu Wang,a Sheng Chen, Hongwen Xuan is a book available to read on EtoBox.

What is Compact Narrow-linewidth Solid-state 193-Nmpulsed Laser Source Utilizing an Opticalparametric Amplifier and Its Vortex Beamgeneration about?

Deep ultraviolet coherent light, particularly at the wavelength of 193 nm, has become indispensablefor semiconductor lithography. We present a compact solid-state nanosecond pulsed laser system capable ofgenerating 193-nm coherent light at the repetition rate of 6 kHz. One part of the 1030-nm laser from the homemade Yb:YAG crystal amplifier is divided to generate 258 nm laser (1.2 W) by fourth-harmonic generation, andthe rest is used to pump an optical parametric amplifier producing 1553 nm laser (700 mW). Frequency mixingof these beams in cascaded LiB3O5 crystals yields a 193-nm laser with 70-mW average power and a linewidthof less than 880 MHz. By introducing a spiral phase plate to the 1553-nm beam before frequency mixing, wegenerate a vortex beam carrying orbital angular momentum. This is, to our knowledge, the first demonstrationof a 193-nm vortex beam generated from a solid-state laser. Such a beam could be valuable for seeding hybridArF excimer lasers and has potential applications in wafer processing and defect inspection.Keywords: 193 nm; deep ultraviolet; vortex beam; nonlinear frequency conversion.

Author

Zhitao Zhang,a,† Xiaobo Heng,a,† Junwu Wang,a Sheng Chen, Hongwen Xuan

Published

2025

Language

EN