Opening book details…
About this Engineering article
Oxygen addition effects in synchrotron radiation excited etching using SF6 by Utsumi, Yuichi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Utsumi, Yuichi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1991
- Field
- Engineering (Physical Sciences)