About this scholarly article

SPIE Proceedings [SPIE 1983 Los Angeles Technical Symposium - Los Angeles (Tuesday 18 January 1983)] Optical Systems Engineering III - 3-D Profile Detection Of Etched Patterns Using A Laser Scanner (3D-SCAN DETECTION) For Automatic Inspection Of Printed Circuit Boards by Ando, Moritoshi; Mita, Kikuo; Kakinoki, Yoshikazu; Inagaki, Takefumi; Taylor, William H. is a scholarly article available to read on EtoBox.

Author

Ando, Moritoshi; Mita, Kikuo; Kakinoki, Yoshikazu; Inagaki, Takefumi; Taylor, William H.

Publisher

SPIE

Published

1983