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AIP Conference Proceedings - Electrical And OES Diagnostics Of A Magnetized RF Discharge In CH[sub 4] Created By A Multihole Cathode Used For a-C:H Deposition by Djerourou, S.; Henda, K.; Ouchabane, M.; Amara, El-Hachemi; Boudjemai, Saïd; Doumaz, Djamila is a Physics and Astronomy article available to read on EtoBox.

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Author
Djerourou, S.; Henda, K.; Ouchabane, M.; Amara, El-Hachemi; Boudjemai, Saïd; Doumaz, Djamila
Publisher
AIP
Published
2008
Language
EN
Field
Physics and Astronomy (Physical Sciences)

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