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About this Engineering article
Fabrication of submicrometer MOSFET's using gas immersion laser doping (GILD) by Carey, P.G.; Bezjian, K.; Sigmon, T.W.; Gildea, P.; Magee, T.J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Carey, P.G.; Bezjian, K.; Sigmon, T.W.; Gildea, P.; Magee, T.J.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0741-3106)
- Published
- 1986
- Language
- EN
- Field
- Engineering (Physical Sciences)
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