About this scholarly article

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Optical Manufacturing and Testing XI - Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq by Fähnle, Oliver W.; Williamson, Ray; Kim, Dae Wook; Faehnle, O.; Langenbach, E.; Zygalsky, F.; Frost, F.; Fechner, R.; Schindler, A.; Cumme, M.; Biskup, H.; Wünsche, C.; Rascher, R. is a scholarly article available to read on EtoBox.

Author

Fähnle, Oliver W.; Williamson, Ray; Kim, Dae Wook; Faehnle, O.; Langenbach, E.; Zygalsky, F.; Frost, F.; Fechner, R.; Schindler, A.; Cumme, M.; Biskup, H.; Wünsche, C.; Rascher, R.

Publisher

SPIE

Published

2015

Language

EN