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CVD System Experiment: Taguchi Design Analysis by Djamel Djam is a document available to read on EtoBox.

What is CVD System Experiment: Taguchi Design Analysis about?

The document presents a statistical design of experiments focusing on a CVD deposition system, detailing the use of a Taguchi L9 array to improve defect density. It includes experimental results, model building, and an analysis of variance (ANOVA) to assess the impact of various parameters on defect density. Key findings include the identification of temperature as a significant factor affecting variation in defect density.

Author

Djamel Djam

Language

EN