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About this Engineering article
Effect of N doping on structure and properties of DLC films produced by plasma beam deposition by Yen, B.K.; Thiele, J.-U.; Geisler, M.; Kasai, P.H.; White, R.L.; York, B.R.; Zadoori, H.; Kellock, A.J.; Tang, W.C.; Tsai-Wei Wu, ; Toney, M.F.; Marchon, B. is a Engineering article available to read on EtoBox.
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- Author
- Yen, B.K.; Thiele, J.-U.; Geisler, M.; Kasai, P.H.; White, R.L.; York, B.R.; Zadoori, H.; Kellock, A.J.; Tang, W.C.; Tsai-Wei Wu, ; Toney, M.F.; Marchon, B.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9464)
- Published
- 2001
- Field
- Engineering (Physical Sciences)