About this scholarly article

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachined Devices and Components V - Material-related effects on wet chemical micromachining of smart MEMS devices by Hein, Aylin; Finkbeiner, Stefan; Marek, Jiri; Obermeier, Ernst; French, Patrick J.; Peeters, Eric is a scholarly article available to read on EtoBox.

Author

Hein, Aylin; Finkbeiner, Stefan; Marek, Jiri; Obermeier, Ernst; French, Patrick J.; Peeters, Eric

Publisher

SPIE

Published

1999

Language

EN