About this Engineering article
Residual-layer-free 3D nanoimprint using hybrid soft templates by Kolli, VijayRamya; Woidt, Carsten; Hillmer, Hartmut is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kolli, VijayRamya; Woidt, Carsten; Hillmer, Hartmut
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2016
- Language
- EN
- Field
- Engineering (Physical Sciences)