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About this Engineering article
Dry Etching Characteristics of Pb(Zr,Ti)O 3 Films in CF 4 and Cl 2 /CF 4 Inductively Coupled Plasmas by Jung, Jin-Ki; Lee, Won-Jong is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jung, Jin-Ki; Lee, Won-Jong
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)