About this scholarly article

2014 IEEE Workshop On Microelectronics And Electron Devices (WMED) - Thermal budget impact on HKMG Al2O3 and La gate stacks for advanced DRAM periphery transistors by Ritzenthaler, R.; Schram, T.; Spessot, A.; Caillat, C.; Na, H.-J.; Lee, S.-G.; Son, Y.; Noh, K. B.; Aoulaiche, M.; Arimura, H.; Horiguchi, N.; Fazan, P.; Thean, A. is a scholarly article available to read on EtoBox.

Author

Ritzenthaler, R.; Schram, T.; Spessot, A.; Caillat, C.; Na, H.-J.; Lee, S.-G.; Son, Y.; Noh, K. B.; Aoulaiche, M.; Arimura, H.; Horiguchi, N.; Fazan, P.; Thean, A.

Publisher

IEEE

Published

2014

Language

EN