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Hydroxyl Radical Formation in H 2 O 2-Amino Acid Mixtures and Chemical Mechanical Polishing of Copper by Hariharaputhiran, M (author);Zhang, J (author);Ramarajan, S (author);Keleher, J J (author);Li, Yuzhuo (author);Babu, S V (author) is a scholarly article available to read on EtoBox.

Author
Hariharaputhiran, M (author);Zhang, J (author);Ramarajan, S (author);Keleher, J J (author);Li, Yuzhuo (author);Babu, S V (author)
Published
2000

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