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About this Materials Science article
Characteristics of Room Temperature Silicon Nitride Deposited by Internal Inductively Coupled Plasma Chemical Vapor Deposition by Kang, Sungchil (author);Lee, Hyun Woo (author);Hong, Mun Pyo (author);Kwon, Kwang Ho (author) is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kang, Sungchil (author);Lee, Hyun Woo (author);Hong, Mun Pyo (author);Kwon, Kwang Ho (author)
- Publisher
- American Scientific Publishers
- Published
- 2014
- Field
- Materials Science (Physical Sciences)