About this scholarly article

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Numerical algorithms for modeling of diffusion of As implanted in Si at low energies and high fluences by Komarov, F. F.; Velichko, O. I.; Mironov, A. M.; Tsurko, V. A.; Zayats, G. M.; Valiev, Kamil A.; Orlikovsky, Alexander A. is a scholarly article available to read on EtoBox.

Author

Komarov, F. F.; Velichko, O. I.; Mironov, A. M.; Tsurko, V. A.; Zayats, G. M.; Valiev, Kamil A.; Orlikovsky, Alexander A.

Publisher

SPIE

Published

2006