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About this Chemistry article
Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry by Reinsberg, K.-G.; Schumacher, C.; Tempez, A.; Nielsch, K.; Broekaert, J.A.C. is a Chemistry article available to read on EtoBox.
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- Author
- Reinsberg, K.-G.; Schumacher, C.; Tempez, A.; Nielsch, K.; Broekaert, J.A.C.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0584-8547)
- Published
- 2012
- Field
- Chemistry (Physical Sciences)
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