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About this Engineering article
Vacancies in Growth-Rate-Varied CZ Silicon Crystal Observed by Low-Temperature Ultrasonic Measurements by Yamada-Kaneta, Hiroshi; Goto, Terutaka; Nemoto, Yuichi; Sato, Koji; Hikin, Masatoshi; Saito, Yasuhiro; Nakamura, Shintaro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yamada-Kaneta, Hiroshi; Goto, Terutaka; Nemoto, Yuichi; Sato, Koji; Hikin, Masatoshi; Saito, Yasuhiro; Nakamura, Shintaro
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)