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About this Engineering article
IIIB-2 a new buried-oxide field isolation for VLSI devices by Kurosawa, K.; Shibata, T.; Iizuka, H. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kurosawa, K.; Shibata, T.; Iizuka, H.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9383)
- Published
- 1981
- Language
- EN
- Field
- Engineering (Physical Sciences)