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AIP Conference Proceedings [AIP The fourteenth international conference on the application of accelerators in research and industry - Denton, Texas (USA) (6-9 Nov 1996)] - Plasma Source Ion Implantation research and applications at Los Alamos National Laboratory by Munson, C. P.; Faehl, R. J.; Henins, I.; Nastasi, M.; Reass, W.; Rej, D. J.; Scheuer, J. T.; Tuszewski, M.; Walter, K. C.; Wood, B. P. is a scholarly article available to read on EtoBox.

Author
Munson, C. P.; Faehl, R. J.; Henins, I.; Nastasi, M.; Reass, W.; Rej, D. J.; Scheuer, J. T.; Tuszewski, M.; Walter, K. C.; Wood, B. P.
Publisher
AIP
Published
1997
Language
EN

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Browse all works by Munson, C. P.; Faehl, R. J.; Henins, I.; Nastasi, M.; Reass, W.; Rej, D. J.; Scheuer, J. T.; Tuszewski, M.; Walter, K. C.; Wood, B. P.