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About this Physics and Astronomy article
Mechanism of Platinum-enhanced Oxidation of Silicon at Low Temperatures by Kobayashi, Hikaru; Yuasa, Toshiro; Yamanaka, Kazuhiro; Yoneda, Kenji; Todokoro, Yoshihiro is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Kobayashi, Hikaru; Yuasa, Toshiro; Yamanaka, Kazuhiro; Yoneda, Kenji; Todokoro, Yoshihiro
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0021-9606)
- Published
- 1998
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)